
Lighography
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O天涯海阁O
主要从事图像分析算法设计、深度学习
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Fundamental concepts about Optics
Book: Optics F2f From Fourier to FresnelA particularly useful solution of the wave equation is a wave with a particular wavelength λ. This is known as the harmonic wave solution and corresponds to the case of monochromatic lightA phasor is a unit vector i原创 2023-08-28 09:27:02 · 251 阅读 · 0 评论 -
Fundamental concepts about Lithography
如果我们希望将 aperture 的pattern 在 image plane(reisit) 上成像,我们可以用 Collimating Lens 光照 pattern, 再用 Focusing Lens 收集光成像。Fraunhofer diffraction - far field. 弗朗霍菲衍射。Fresnel diffraction - near field. 菲涅耳衍射。原创 2023-08-26 16:32:45 · 340 阅读 · 0 评论 -
Lithography tutor
So how does this optical path difference affect the formation of an image? For light, the path length traveled is equivalent to a change in phase. Thus, the OPD can be expressed as a phase error,Our interpretation of defocus is that it causes a phase error原创 2022-10-27 13:13:41 · 223 阅读 · 0 评论